Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering

Olayinka Oluwatosin Abegunde, Esther Titilayo Akinlabi, Oluseyi Philip Oladijo

Research output: Contribution to conferencePaper

Abstract

In this research study, the effect of temperature and radio frequency (RF) power on the surface morphology and structural properties of titanium carbide (TiC) thin film was studied. TiC thin film was deposited on the surface of commercially pure titanium (CpTi) alloys to enhance its surface properties. During the deposition process, the sputtering temperature and RF power were varied while other sputtering parameters were kept constant. Field emission scanning electron microscope was used to analyze the surface profiling of the film, and atomic force microscope was used to study the surface roughness. Raman spectroscopy was used to determine the film composition, and grazing incidence X-ray diffractometer was used to analyze the phase composition. Nanoindentation was carried out to understand the hardness and Young’s modulus properties of the coating. The results reveal the dependency of the thin film properties on the independent process parameters.

Original languageEnglish
Pages583-590
Number of pages8
DOIs
Publication statusPublished - 2021
Event2nd International Conference on Mechanical Engineering Design, ICMechD 2019 - Chennai, India
Duration: Apr 25 2019Apr 26 2019

Conference

Conference2nd International Conference on Mechanical Engineering Design, ICMechD 2019
CountryIndia
CityChennai
Period4/25/194/26/19

All Science Journal Classification (ASJC) codes

  • Automotive Engineering
  • Aerospace Engineering
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

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    Abegunde, O. O., Akinlabi, E. T., & Oladijo, O. P. (2021). Temperature and RF Power Effect on the Morphology and Structural Properties of TiC Thin Film Grown by RF Magnetron Sputtering. 583-590. Paper presented at 2nd International Conference on Mechanical Engineering Design, ICMechD 2019, Chennai, India. https://doi.org/10.1007/978-981-15-4745-4_51