Sustainability issues in sputtering deposition technology

F. M. Mwema, E. T. Akinlabi, O. P. Oladijo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Sputtering involves ejection of atoms from a surface upon impingement by energetic ions generated by a plasma. The plasma is created by a large potential difference (2 kV) between the cathode and anode in vacuum and it contains both electrons and ions. These ions get accelerated towards the target (cathode) to eject the adatoms of the target that deposits onto the substrate to form a thin film. The deposition rate of sputtering depends on the plasma density; higher plasma density increases the ions involved in bombardment of the target. Like any other manufacturing process, sputtering technology is associated with sustainability aspects such as control of the plasma density, input potential voltage and current, efficiency of sputtering (sputtering yield, mean free path), cooling system (input water and cooling power), temperature (substrate and target) and maintenance of the sputtering systems. Issues of production rates, automation and mass production are also very important for sustainable manufacturing process including sputtering technology. Optimization of the process parameters for deposition of specific films should consider these sustainability issues. This article highlights these sustainable issues with an effort to evaluate the sustainability of sputtering as a thin film deposition technology using HHV TF500 Thin Film Deposition System as a case study.

Original languageEnglish
Title of host publication4th North American IEOM Conference. IEOM 2019
PublisherIEOM Society
Pages737-744
Number of pages8
ISBN (Print)9781532359507
Publication statusPublished - 2019
Event4th North American IEOM Conference. IEOM 2019 - Toronto, Canada
Duration: Oct 23 2019Oct 25 2019

Publication series

NameProceedings of the International Conference on Industrial Engineering and Operations Management
ISSN (Electronic)2169-8767

Conference

Conference4th North American IEOM Conference. IEOM 2019
CountryCanada
CityToronto
Period10/23/1910/25/19

All Science Journal Classification (ASJC) codes

  • Strategy and Management
  • Management Science and Operations Research
  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering

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