Optical properties of co-sputtered copper-aluminium Films

T. S. Sathiaraj, Sunil Kumar, K. R.S. Devan

Research output: Contribution to journalConference article

Abstract

Composite films of copper and aluminum were deposited by reactive direct current co-sputtering of copper and aluminum. Varying the number of copper pieces during deposition made it possible to vary the composition of the films. In order to understand the optical behavior of the coatings, the transmittance and the near normal reflectance spectra in the 300-2500nm wavelength range are fitted with model dielectric functions. Valuable information regarding the surface roughness layer and its thickness are obtained. The thicknesses of the layers obtained by modeling were confirmed by surface profilometry. The extracted optical constants by the model were compared with calculations from Maxwell-Garnett, Bruggeman and incremental Maxwell-garnett effective medium theories. The XPS studies done on the samples reveal that the number of copper pieces used during co-sputtering control the formation of copper oxide.

Original languageEnglish
Article number03
Pages (from-to)24-33
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5509
DOIs
Publication statusPublished - Dec 1 2004
EventNanomodeling - Denver, CO, United States
Duration: Aug 2 2004Aug 3 2004

Fingerprint

Aluminum
Copper
Optical Properties
Optical properties
aluminum
optical properties
copper
Sputtering
sputtering
Profilometry
Optical constants
Copper oxides
Optical Constants
copper oxides
Composite films
Transmittance
transmittance
surface roughness
Surface Roughness
Reflectance

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

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abstract = "Composite films of copper and aluminum were deposited by reactive direct current co-sputtering of copper and aluminum. Varying the number of copper pieces during deposition made it possible to vary the composition of the films. In order to understand the optical behavior of the coatings, the transmittance and the near normal reflectance spectra in the 300-2500nm wavelength range are fitted with model dielectric functions. Valuable information regarding the surface roughness layer and its thickness are obtained. The thicknesses of the layers obtained by modeling were confirmed by surface profilometry. The extracted optical constants by the model were compared with calculations from Maxwell-Garnett, Bruggeman and incremental Maxwell-garnett effective medium theories. The XPS studies done on the samples reveal that the number of copper pieces used during co-sputtering control the formation of copper oxide.",
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Optical properties of co-sputtered copper-aluminium Films. / Sathiaraj, T. S.; Kumar, Sunil; Devan, K. R.S.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5509, 03, 01.12.2004, p. 24-33.

Research output: Contribution to journalConference article

TY - JOUR

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AU - Kumar, Sunil

AU - Devan, K. R.S.

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