Matrix-effect correction in oxide crystal Auger electron spectroscopy

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A simple model is presented for the calculation of surface elemental composition, surface impurity content and surface chemical termination in complex oxide crystal surfaces. The model is based upon Auger electron spectroscopic measurements and takes electronic inelastic mean free paths or attenuation lengths and bulk crystallographic data into consideration. Different results are obtained when using either the attenuation length or the electronic inelastic mean free path for the surfaces stoichiometric weights. MgO(100), SrTiO3(100), LaAlO3(100), and YBa2Cu3O7-x (001) are used as test samples. Uncertainties are estimated at 10-20%.

Original languageEnglish
Pages (from-to)337-349
Number of pages13
JournalSurface Science
Issue number1-3
Publication statusPublished - Feb 2 1991

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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