The influence of surface pretreatment on the integrity of Tridecafloro-1,1,2,2-tetrahydrooctyltrichlorosilane (FOTS) coating on the substrate is presented. FOTS is a hydrophobic organic compound deposited on the SS 304 surface to enhance the corrosion protection of the metal. The surface was pretreated with silicon oxide, plasma oxide and both served as adhesions before the coating was deposited on the substrate by atomic layer deposition technique. The coatings were characterized by scanning electron microscope (morphology), atomic force microscope (surface roughness). The chemical composition and bonding structure were obtained by X-ray diffraction (XRD) and Attenuated-Fourier transform infrared (ATR-FTIR). The durability of the coating in corrosive media was investigated through electrochemical polarization and electrochemical impedance spectroscopy (EIS). The results obtained showed that silicon oxide pre-treated steel gave a better stability and improved properties to the coating than the plasma oxide pre-treated surface, and was distinctly discussed.