Effect of AFM scan size on the scaling law of sputtered aluminium thin films

F. M. Mwema, Esther T. Akinlabi, O. P. Oladijo, Stephen A. Akinlabi, S. Hassan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The effect of scan size of the atomic force microscopy (AFM) imaging on the fractal characteristics of aluminium thin films deposited on stainless steel substrates by radiofrequency magnetron sputtering is presented. Three scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm were used to obtain the images on the AFM facility. Visual examination revealed that using very high scan size (10 × 10 μm) captured poorer images, although with more features. One-dimensional fractal dimensions were obtained as 1.610 ± 0.012, 1.606 ± 0.011 and 1.563 ± 0.014 for scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm, respectively. Multifractal analyses revealed that images obtained at lower scan sizes (3 × 3 μm and 5 × 5 μm) were mono-fractal, whereas those obtained at scan size of 10 × 10 μm were multifractal. The results suggest that the scan size can significantly influence the scaling results of the AFM measurements and therefore should be carefully chosen.

Original languageEnglish
Title of host publicationAdvances in Manufacturing Engineering - Selected Articles from ICMMPE 2019
EditorsSeyed Sattar Emamian, Farazila Yusof, Mokhtar Awang
PublisherSpringer Nature, Singapore
Pages171-176
Number of pages6
ISBN (Electronic)978-981-15-5753-8
ISBN (Print)978-981-15-5752-1
DOIs
Publication statusPublished - Sep 2020
Event5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019 - Kuala Lumpur, Malaysia
Duration: Nov 19 2019Nov 21 2019

Publication series

NameLecture Notes in Mechanical Engineering
ISSN (Print)2195-4356
ISSN (Electronic)2195-4364

Conference

Conference5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019
CountryMalaysia
CityKuala Lumpur
Period11/19/1911/21/19

All Science Journal Classification (ASJC) codes

  • Automotive Engineering
  • Aerospace Engineering
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Fingerprint Dive into the research topics of 'Effect of AFM scan size on the scaling law of sputtered aluminium thin films'. Together they form a unique fingerprint.

  • Cite this

    Mwema, F. M., Akinlabi, E. T., Oladijo, O. P., Akinlabi, S. A., & Hassan, S. (2020). Effect of AFM scan size on the scaling law of sputtered aluminium thin films. In S. S. Emamian, F. Yusof, & M. Awang (Eds.), Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019 (pp. 171-176). (Lecture Notes in Mechanical Engineering). Springer Nature, Singapore. https://doi.org/10.1007/978-981-15-5753-8_16