Dependence of fractal characteristics on the scan size of atomic force microscopy (AFM) phase imaging of aluminum thin films

F. M. Mwema, E. T. Akinlabi, O. P. Oladijo

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

In this article, data demonstrating the effect of scan size on the fractal characteristics of phase images obtained via atomic force microscopy (AFM) are presented. The AFM phase imaging was conducted on thin aluminum films deposited on stainless steel substrates by radiofrequency (RF) magnetron sputtering at power of 150 W for 2 h and at room temperature. The AFM phase images were obtained at three different scan sizes (1 × 1 lm, 3 × 3 lm, 30 × 30 lm) at a constant scan rate and proportional-integral-deri vative (PID) control. The raw and analyzed data of the AFM visuals (micrographs) are presented in this article. The data on power spectral density functions (PDSF), fractal dimensions (D) and texture features obtained through image analyses at different scan sizes are also presented. The article also contains data (PSDF and fractal dimensions) comparing the fractal features obtained from the phase and height AFM micrographs at large scan size (30 × 30 lm). The data can be used in optimization of AFM measurement for industrial quality control.

Original languageEnglish
Pages (from-to)1540-1545
Number of pages6
JournalMaterials Today: Proceedings
Volume26
Issue numberPart 2
DOIs
Publication statusPublished - 2020
Event10th International Conference of Materials Processing and Characterization, ICMPC 2020 - Mathura, India
Duration: Feb 21 2020Feb 23 2020

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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