A multifractal study of al thin films prepared by rf magnetron sputtering

F. M. Mwema, Esther T. Akinlabi, O. P. Oladijo, Stephen A. Akinlabi, S. Hassan

Research output: Contribution to conferencePaper

Abstract

In this article, a multi-fractal approach has been employed to study the micromorphology of sputtered aluminium films by radio frequency magnetron sputtering method. The films were prepared at 150 and 200 W on stainless and mild steel substrates of 50 mm by 50 mm by 3 mm dimensions. The substrates and targets were maintained at room temperature. The surface microstructures of the films were imaged using atomic force microscopy (AFM). The images were then subjected to the cube counting method to calculate the fractal dimension (D) and multifractal analysis to comprehend the complex nature of the sputtered Al films. The results show that the fractal dimension increases with power for mild steel substrates and decreases with RF power for stainless steel substrates. The multifractal behaviour determined through mass exponent as a function of moment order, singularity strength as a function of singularity exponent, and generalized fractal dimension as a function of moment order reveals that all the films are multifractal in nature.

Original languageEnglish
Pages687-694
Number of pages8
DOIs
Publication statusPublished - Sep 2020
Event5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019 - Kuala Lumpur, Malaysia
Duration: Nov 19 2019Nov 21 2019

Conference

Conference5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019
CountryMalaysia
CityKuala Lumpur
Period11/19/1911/21/19

All Science Journal Classification (ASJC) codes

  • Automotive Engineering
  • Aerospace Engineering
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

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  • Cite this

    Mwema, F. M., Akinlabi, E. T., Oladijo, O. P., Akinlabi, S. A., & Hassan, S. (2020). A multifractal study of al thin films prepared by rf magnetron sputtering. 687-694. Paper presented at 5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019, Kuala Lumpur, Malaysia. https://doi.org/10.1007/978-981-15-5753-8_63